Description
6-inch wide erosion cathode 3 units Side sputtering method Maximum temperature 300°C Substrate heating mechanism, substrate cleaning mechanism, substrate cooling mechanism (gas cooling) installed Substrate holder φ420 3φ200V 50/60HzConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
CANON / ANELVA
SPL-500
Verified
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
70943
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON / ANELVA
SPL-500
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
70943
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
6-inch wide erosion cathode 3 units Side sputtering method Maximum temperature 300°C Substrate heating mechanism, substrate cleaning mechanism, substrate cooling mechanism (gas cooling) installed Substrate holder φ420 3φ200V 50/60HzConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents