Description
No descriptionConfiguration
No ConfigurationOEM Model Description
System configuration: Load lock type tray transport method Substrate size: φ200mm maximum Cathode: φ4" cathode ×3 (Option: φ12.5" cathode ×1, φ4" cathode ×4) Operation method: Fully automated (pumping, transport, deposition)Documents
No documents
Verified
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
125114
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON / ANELVA
EB1100
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
125114
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
No ConfigurationOEM Model Description
System configuration: Load lock type tray transport method Substrate size: φ200mm maximum Cathode: φ4" cathode ×3 (Option: φ12.5" cathode ×1, φ4" cathode ×4) Operation method: Fully automated (pumping, transport, deposition)Documents
No documents