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Marketplace > PVD / CVD / ALD > TEL / TOKYO ELECTRON > TRIASe+ Ti/TiN
TEL / TOKYO ELECTRON TRIASe+ Ti/TiN
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    TEL / TOKYO ELECTRON

    TRIASe+ Ti/TiN

    Created: March 1, 2021

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    Last Verified: 4 days ago

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    Key Item Details

    Condition: As Is

    Product ID: 32191

    Wafer Sizes: 12"/300mm

    Vintage: 2014

    Description

    Metal CVD (Chemical Vapor Deposition)

    Configuration

    No Configuration

    Other Information
    No Other Information Provided
    OEM Model Description

    Triase+™ Ti/TiN is a 300mm single-wafer metal CVD system for high step coverage Ti/TiN film formation using TiCl4.

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