Used TEL / TOKYO ELECTRON TRIASe+ Ti/TiN Equipment | Moov

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Marketplace > Deposition > TEL / TOKYO ELECTRON > TRIASe+ Ti/TiN

TEL / TOKYO ELECTRON

TRIASe+ Ti/TiN

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Overview

Triase+™ Ti/TiN is a 300mm single-wafer metal CVD system for high step coverage Ti/TiN film formation using TiCl4.

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