TRIASe+ Ti/TiN
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DepositionOverview
Triase+™ Ti/TiN is a 300mm single-wafer metal CVD system for high step coverage Ti/TiN film formation using TiCl4.
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Triase+™ Ti/TiN is a 300mm single-wafer metal CVD system for high step coverage Ti/TiN film formation using TiCl4.
3
Inspection, Insurance, Appraisal, Logistics