ASM
EAGLE XP8
PVD / CVD / ALD
Vintage: Unknown
Condition: Used
Last Verified
Over 60 days ago
Eagle XP8 is a high productivity 300mm tool for PEALD applications. The Eagle XP8 PEALD system can be configured with up to four Dual Chamber Modules (DCM), enabling eight chambers in high volume production within a very compact footprint.
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