Description
3 reactors ASM Eagle XP8 Plasma Enhanced ALD ToolConfiguration
XP8 Platform Front and rear Operations/Maintenance Touch Screen with pen Loader module transfer robot and controller with 3 load ports. 2 Load locks Wafer cooling chamber Four BOC Edwards dry pump (subject to availability) Exhausted gas box with 8 MFC capability per chamber 2 RF generators and controller per chamber Remote plasma cleaning (RPU) per chamber Two RF matchers per chamberOEM Model Description
Eagle XP8 is a high productivity 300mm tool for PEALD applications. The Eagle XP8 PEALD system can be configured with up to four Dual Chamber Modules (DCM), enabling eight chambers in high volume production within a very compact footprint.Documents
ASM
EAGLE XP8
Verified
CATEGORY
ALD
Last Verified: 28 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
101682
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASM
EAGLE XP8
CATEGORY
ALD
Last Verified: 28 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
101682
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available