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    Key Item Details


    Operational Status:

    Product ID:72561

    Wafer Sizes:12"/300mm



    No description available


    Process PE-ALD System Software Version Eagle I ASMJ software (Windows embedded XP / OS) Process PE-ALD Oxide, HT-SiO/HT-SiN Main System ASM PE-ALD System Mainframe 1 Handler System FI: Kawasaki / Vac: JEL 1 Factory Interface FOUP 2 Options System Others Process Chamber (RC3 / RC4) 2 Hardware Configuration (subfab/ auxiliary units): Power Rack 1

    OEM Model Description

    Plasma enhanced atomic layer deposition

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