Description
DRY PUMPConfiguration
No ConfigurationOEM Model Description
Typical applications for the Model ESR80W dry vacuum pump include load locks, SEM, Etch, CVD, PVD, Ashing and Ion Implant processes that require the best vacuum performance and optimum uptime. Pumping Speed (60 Hz): 4,000~8,500 l/minDocuments
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EBARA
ESR80W
CATEGORY
Pumps / Compressor
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
132731
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
DRY PUMPConfiguration
No ConfigurationOEM Model Description
Typical applications for the Model ESR80W dry vacuum pump include load locks, SEM, Etch, CVD, PVD, Ashing and Ion Implant processes that require the best vacuum performance and optimum uptime. Pumping Speed (60 Hz): 4,000~8,500 l/minDocuments
No documents