EBARA

A500W-MIU

AA30N

EV-S21A

EV-S100N

EV-M502N

The Model EV-M302N dry vacuum pumps are designed for high-load applications where large volumes of reaction byproducts are generated. Its outstanding power consumption performance and enhanced corrosion resistance, as a standard, support a broad range of industry applications.           

Options:
-Various Booster & Exhaust Thermal Configurations (Process Dependent)
-ESD Resistance
-Idle Mode (Green Energy Mode)
-Hardware: Seismic Brackets
-Pump Systems – Integrated Rack Solutions
-Pump Installation Lifts
-Reusable Shipping Crates

EV-M302N

AA10Nv1	

Dry Pump
Pumping Speed (60 Hz): 20,000 l/min

EV-S200P

AA70WV1-H

EV-S100P

A300W	

AA70WNV1-H

EV-M502NF

Dry (oil free) vacuum pumps
Pumping Speed (60 Hz): 30,000 l/min

EST500WN

EMT2400MBWC	

AA10NV1-H

150X40UERP6M-J

Dry Pump
Pumping Speed (60 Hz): 30,000 l/min


ESA300W

EV-A10-2

The ESA70W dry vacuum pump by Ebara is designed for light-gas applications like MOCVD. It offers options like dual voltage, alternate exhaust configurations, NiResist cast material, idle mode, seismic brackets, integrated rack solutions, installation lifts, and reusable shipping crates. It's perfect for medium to light-duty processes, hydrogen handling, large load-lock applications, and as a replacement for the A Series EBARA Model A70W pump.

ESA70W-D

AAS20N

150X40 UERP6M-U

EV-A03-1

A40W

AA100V1 H

EV-A06-3

AA100W-H

A200W

AA10V1

40X20ERD5M-NJ

AA40WNV1-E

Typical applications for the Model ESR80W dry vacuum pump include load locks, SEM, Etch, CVD, PVD, Ashing and Ion Implant processes that require the best vacuum performance and optimum uptime.
Pumping Speed (60 Hz): 4,000~8,500 l/min

ESR80W

IQDP 40

ESR201W

ET300WS	

AA30W

40X20ERD5M

UFP-100/150A

80x25UERR6M	

A500W-T	

50X20UERR6M

EV-M102N	

UERR6M 50X20 

306W	

EV-M502NS

A30W N

40×20 ERD5M-N

ESR100WN

A30W-C

ESR100-CN

EV-S20

Pumping Speed: 1670 L/min
Ultimate Pressure: 5.0 Pa

EV-S20N

A10S

AA40W

A30W

A70W

AA70W

A150W-T

A150W-M

150 X 40

AAE40WN

AA200WN

A25S

AA200W

EAC300BI-T

80 X 25

40 X 20

ESR80WN

AA10

AA30

ESA70W

A70WN	

AA70WN

Dry (oil free) vacuum pumps
Pumping Speed (60 Hz): 20,000 l/min

EST200WN

ESR20N

150X40 UERP6M

Pumping Speed: 1670 L/min
Ultimate Pressure: 5.0Pa

EV-S20P

AA40WN

ESA25-D

AA10N	

50 X 20

ET600H-US

ET-600	

Pumping speed (N2) l/min. 7000
Pumping speed (N2) m3/h 420
Ultimate pressure mbar 2x10-3
Ultimate pressure Pa 0.2
Water Consumption l/min 3.5-8
Nitrogen Consumption SLM 11-13
Nitrogen Consumption Pa m3/sec 19-22
Voltages ranges V 200-220/380-415
Motor power, installed kW 7.5
Weight, approx. kg 280
Sizes (LxWxH) mm 830x400x800
Inlet flange size DN 50 KF
Outlet flange size DN 40 KF

AAS70WN

ESR200WN

AAS300WN

ET-300W	

Technical Characteristics:
-DC Motor
-Low Energy consumption
-Complete pump safeguard system
-High pump operating temperature preventing condensation
-Low noise and low vibration

AAL10

AA40WV1-H

305W

AAS200WN

Dry (oil free) vacuum pumps 
Pumping Speed (60 Hz): 30,000 l/min

EST300WN

AAS100WN

AA20

Vacuum Dry Pump AA20N-H, 200V, 50/60 Hz, Corrosian Resist, Horizontal Outlet, with Exhaust Pressure Sensor

EBARA

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Top EBARA Pumps / Compressor

AA30N

A500W-MIU

EV-S21A

EV-S100N

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