EBARA

AA40W

A10S

A150W-T

A150W-M

AA70W

A30W

150 X 40

AAE40WN

AA200W

AA200WN

80 X 25

40 X 20

AA30

A70W

AA10N	

AA10

AA40WN

50 X 20

Dry (oil free) vacuum pumps
Pumping Speed (60 Hz): 20,000 l/min

EST200WN

ESA70W

ET600H-US

ESR80WN

AAS300WN

ET-600	

Pumping Speed: 1670 L/min
Ultimate Pressure: 5.0Pa

EV-S20P

Technical Characteristics:
-DC Motor
-Low Energy consumption
-Complete pump safeguard system
-High pump operating temperature preventing condensation
-Low noise and low vibration

AAL10

ESR20N

150X40 UERP6M

A70WN	

AAS200WN

ET-300W	

AA40WV1-H

AA70WN

AA20N

EMT2400MBWC	

Pumping speed (N2) l/min. 7000
Pumping speed (N2) m3/h 420
Ultimate pressure mbar 2x10-3
Ultimate pressure Pa 0.2
Water Consumption l/min 3.5-8
Nitrogen Consumption SLM 11-13
Nitrogen Consumption Pa m3/sec 19-22
Voltages ranges V 200-220/380-415
Motor power, installed kW 7.5
Weight, approx. kg 280
Sizes (LxWxH) mm 830x400x800
Inlet flange size DN 50 KF
Outlet flange size DN 40 KF

AAS70WN

A300W	

A25S

Dry (oil free) vacuum pumps
Pumping Speed (60 Hz): 30,000 l/min

EST500WN

EST100WNHT	

ESR200WN

Dry (oil free) vacuum pumps 
Pumping Speed (60 Hz): 30,000 l/min

EST300WN

ESDP 30	

Vacuum Dry Pump A07V-B, 200V, 50/60 Hz, Basic Version

A07V-B

Vacuum Dry Pump AA20-H, 200V, 50/60 Hz, Horizontal Outlet

AA20-H

AA70WN-H

ESR201W

ET1600WS

A07V

AA20

AA70W-H

EST100WN

AA100W

AAS100WN

CS-22

A30W N

A150W

ESR100WN

ESA25-D

Pumping Speed: 1670 L/min
Ultimate Pressure: 5.0 Pa

EV-S20N

Vacuum Dry Pump AA20N-H, 200V, 50/60 Hz, Corrosian Resist, Horizontal Outlet, with Exhaust Pressure Sensor

AA20N-H

Dry Pump
Pumping Speed (60 Hz): 30,000 l/min


ESA300W

ET300WS	

AA30W

150X40 UERP6M-U

AA70WNV1-H

Dry Pump
Pumping Speed (60 Hz): 20,000 l/min

EV-S200P

EV-M502NF

40X20ERD5M

The Model EV-M302N dry vacuum pumps are designed for high-load applications where large volumes of reaction byproducts are generated. Its outstanding power consumption performance and enhanced corrosion resistance, as a standard, support a broad range of industry applications.           

Options:
-Various Booster & Exhaust Thermal Configurations (Process Dependent)
-ESD Resistance
-Idle Mode (Green Energy Mode)
-Hardware: Seismic Brackets
-Pump Systems – Integrated Rack Solutions
-Pump Installation Lifts
-Reusable Shipping Crates

EV-M302N

AA10NV1-H

A30W-C

150X40UERP6M-J

UFP-100/150A

80x25UERR6M	

A500W-T	

EV-S20

50X20UERR6M

EV-M102N	

AAS20N

UERR6M 50X20 

40X20ERD5M-NJ

The ESA70W dry vacuum pump by Ebara is designed for light-gas applications like MOCVD. It offers options like dual voltage, alternate exhaust configurations, NiResist cast material, idle mode, seismic brackets, integrated rack solutions, installation lifts, and reusable shipping crates. It's perfect for medium to light-duty processes, hydrogen handling, large load-lock applications, and as a replacement for the A Series EBARA Model A70W pump.

ESA70W-D

EV-M502NS

A200W

AA100W-H

AA40WNV1-E

ESR100-CN

AA10V1

A40W

EV-A06-3

Typical applications for the Model ESR80W dry vacuum pump include load locks, SEM, Etch, CVD, PVD, Ashing and Ion Implant processes that require the best vacuum performance and optimum uptime.
Pumping Speed (60 Hz): 4,000~8,500 l/min

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

EBARA

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Top EBARA Pumps / Compressor

AA40W

A10S

A150W-T

A150W-M

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