Description
Pumping Speed: 42 cfm Ultimate Pressure: 50Hz/60Hz –0.040/ 0.030 Torr 5 Pump Stages Motor Rating: 50Hz / 60Hz – 3,460 RPM, 3 HP Electrical Requirements: 50Hz – 200 VAC 60Hz – 200-220 VAC, 3 Phase, 40 Amp Cooling Water Requirements: 1.3 - 2.1 GPM at 60 PSI, Max. Temp. 30C Dimensions 39.3” x 16.1” x 19.2” weight 440 lbsConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
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EBARA
40 X 20
Verified
CATEGORY
Pumps / Compressor
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
16115
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View AllEBARA
40 X 20
CATEGORY
Pumps / Compressor
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
16115
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Pumping Speed: 42 cfm Ultimate Pressure: 50Hz/60Hz –0.040/ 0.030 Torr 5 Pump Stages Motor Rating: 50Hz / 60Hz – 3,460 RPM, 3 HP Electrical Requirements: 50Hz – 200 VAC 60Hz – 200-220 VAC, 3 Phase, 40 Amp Cooling Water Requirements: 1.3 - 2.1 GPM at 60 PSI, Max. Temp. 30C Dimensions 39.3” x 16.1” x 19.2” weight 440 lbsConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents