Description
Equipment Type Contact stylus surface profiler Measurement Method Contact stylus profilometry Max. Sample Size 254 mm Max. Scan Length 60 mm Vertical Range 13 µm to 300 µm Vertical Resolution 1 Å at 13 µm range; 25 Å at 300 µm range Scan Speed 1 µm/s to 25 mm/s Stylus Force 1–100 mg Typical Analysis Step height / Roughness / WavinessConfiguration
No ConfigurationOEM Model Description
Tencor P-10 is an equipment used for research and development engineering that analyzes various substrates, including glass, ceramics, wafers, disks, and precision-machined surfaces. With an optional MicroHead II low-force measurement head, it can accurately measure soft surfaces like indium, gold, and photoresist.Documents
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KLA
P-10
CATEGORY
Profiler
Last Verified: 8 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
153958
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Equipment Type Contact stylus surface profiler Measurement Method Contact stylus profilometry Max. Sample Size 254 mm Max. Scan Length 60 mm Vertical Range 13 µm to 300 µm Vertical Resolution 1 Å at 13 µm range; 25 Å at 300 µm range Scan Speed 1 µm/s to 25 mm/s Stylus Force 1–100 mg Typical Analysis Step height / Roughness / WavinessConfiguration
No ConfigurationOEM Model Description
Tencor P-10 is an equipment used for research and development engineering that analyzes various substrates, including glass, ceramics, wafers, disks, and precision-machined surfaces. With an optional MicroHead II low-force measurement head, it can accurately measure soft surfaces like indium, gold, and photoresist.Documents
No documents