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KLA HRP-340
  • KLA HRP-340
  • KLA HRP-340
  • KLA HRP-340
Description
HIGH RESOLUTION PROFILOMETER,CU
Configuration
No Configuration
OEM Model Description
KLA-Tencor HRP 340 is among the most production worthy metrology solutions in 300mm segment, supporting the most advanced applications including: etch, CMP, and C4 bump monitoring, and more. The 340 series configurations are designed to meet cost, performance, and automation requirements and can be configured as a single open cassette, or dual FIMS for stringent particle requirements. The system utilizes KLA-Tencor's proprietary UltraLite sensor technology for maintaining constant tip-sample forces and vertical linearity over the full Z range. The HRP 340 features a configurable piezo flexure sensor stage for high resolution scans.
Documents

No documents

verified-listing-icon

Verified

CATEGORY
Profiler

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

101699


Wafer Sizes:

Unknown


Vintage:

Unknown


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

KLA

HRP-340

verified-listing-icon
Verified
CATEGORY
Profiler
Last Verified: Over 60 days ago
listing-photo-b59efb129f6b4561a8aba3d672e05ba9-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

101699


Wafer Sizes:

Unknown


Vintage:

Unknown


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
HIGH RESOLUTION PROFILOMETER,CU
Configuration
No Configuration
OEM Model Description
KLA-Tencor HRP 340 is among the most production worthy metrology solutions in 300mm segment, supporting the most advanced applications including: etch, CMP, and C4 bump monitoring, and more. The 340 series configurations are designed to meet cost, performance, and automation requirements and can be configured as a single open cassette, or dual FIMS for stringent particle requirements. The system utilizes KLA-Tencor's proprietary UltraLite sensor technology for maintaining constant tip-sample forces and vertical linearity over the full Z range. The HRP 340 features a configurable piezo flexure sensor stage for high resolution scans.
Documents

No documents