Description
Surface ProfilerConfiguration
No ConfigurationOEM Model Description
KLA-Tencor HRP 340 is among the most production worthy metrology solutions in 300mm segment, supporting the most advanced applications including: etch, CMP, and C4 bump monitoring, and more. The 340 series configurations are designed to meet cost, performance, and automation requirements and can be configured as a single open cassette, or dual FIMS for stringent particle requirements. The system utilizes KLA-Tencor's proprietary UltraLite sensor technology for maintaining constant tip-sample forces and vertical linearity over the full Z range. The HRP 340 features a configurable piezo flexure sensor stage for high resolution scans.Documents
No documents
Similar Listings
View All
KLA
HRP-340
CATEGORY
Profiler
Last Verified: 4 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
152184
Wafer Sizes:
8"/200mm
Vintage:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Surface ProfilerConfiguration
No ConfigurationOEM Model Description
KLA-Tencor HRP 340 is among the most production worthy metrology solutions in 300mm segment, supporting the most advanced applications including: etch, CMP, and C4 bump monitoring, and more. The 340 series configurations are designed to meet cost, performance, and automation requirements and can be configured as a single open cassette, or dual FIMS for stringent particle requirements. The system utilizes KLA-Tencor's proprietary UltraLite sensor technology for maintaining constant tip-sample forces and vertical linearity over the full Z range. The HRP 340 features a configurable piezo flexure sensor stage for high resolution scans.Documents
No documents