Description

Karl Suss Micro Tec PA-200/PA200 Semiautomatic Wafer Prober with Quantity 3: PH500 Programmable ProbeHeads The PH500 ProbeHead Description: The PH500 uses the same overall construction and precision ball-bearing slides as the PH600. It differs through the use of a drive system which provides less resolution, but a much higher speed. The PH500 can be used for hands-off probing of structures down to a micron and for automating difficult access production probing. Typical accuracy valves are better than ±10 µm across 25 mm at 5 mm/sec.

Configuration

The Unit's Serial Number Tag Reads: Model Number: PA200 Serial Number: 45254 Date: 2005 Power Requirements: 240 VAC, 50/60 Hz, 500 VA CE Marked: Yes PH500 ProbeHead Specifications: Travel Range, XY/Z: 25/10 mm Encoder Resolution: 1.0 µm Practical Step Size Down to: 5 µm Repeatability, XY: ±1.5 µm (double sided, 3 mm travel) Accuracy, XY Over 10 mm x 10 mm: Uncompensated: ±10 µm Matrix Compensation: ±5 µm Maximum Speed, XYZ: 5 mm/sec Typical Cycle Time: 2 x 200 µm Z, 5 mm XY: 2 sec 2 x 20 µm Z, 500 µm XY: < 0.5 sec Dimensions without Arm: 180 mm x 135 mm x 105 mm Fixation Type - Standard Option: Vacuum, mechanic bolt down, magnetic Probe Arms: Standard and Flexible probe arm for dc probating. Fixation for SUSS IZI and other RF Probes.

OEM Model Description

The SUSS PA200 Semiautomatic Probe System is available as two versions, one for high speed (HS) and one for high resolution (HR) applications. They are both very stable, modular and flexible probe systems for wafers and substrates up to 200 mm (8).