Description
ICP double ChmbaerConfiguration
Process chamber(ICP) X 2 Slit door X 2 Heater block X 2 Lift Pin X 2 Top plate X 2 Robot X 1 Shuttle X 1 Cassette nest X 1 Shuttle dump X 1 Loadlock X 1 Cooling cahmebr X 1 Operator Box X 1 Temp panel X 2 Gas panel X 2 Gas box X 2 Cassdoor X 1 ARM X 1 Paddle X 2 DC BOX X 1 AC BOX X 1OEM Model Description
MATTSON Aspen II is Etchers & Ashers system. the Aspen II can be used with 8” wafer size. Aspen II is based on a highly reliable and productive system design. It provides proven process capabilities and cost of ownership benefits in high volume manufacturing to chipmakers worldwide.Documents
MATTSON
ASPEN II
Verified
CATEGORY
Plasma Etch
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
102019
Wafer Sizes:
4"/100mm, 6"/150mm, 8"/200mm
Vintage:
1998
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Available
Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
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View AllMATTSON
ASPEN II
Verified
CATEGORY
Plasma Etch
Last Verified: 21 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
102019
Wafer Sizes:
4"/100mm, 6"/150mm, 8"/200mm
Vintage:
1998
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available