Skip to main content
Moov logo
Moov Icon
HITACHI M 712
    Description
    No description
    Configuration
    Type: 300mm M712 mainframe M711 setup one Etch chamber Software revision: 1.07 PMv.02.16M Etcher, 12" (3) Cassettes Positions SECS II Interface: HSMS Neslab coolflow III Chiller Power supply: 208 VAC, 3-Phase, 50/60 Hz Mainframe: Robot P/N: CR-712V HITACHI 3 position Loader Chamber: ESC Type: Bipolar Endpoint type: Hitachi EPD monitor ePMv02.16M SHIMAZU EC TMP 3203LMC-K1 EC TMP Controller DAIHEN ES7-IIA EC Source generator PEARL CF-500-400K EC Bias generator Gas configuration: Line / EC1 / Strip 1 / Ar 2 / C12 3 / SF6 4 / HBr 5 / CF3 6 / CH4 7 / NF3 8 / O2 9 / N2 10/ SF6 11/ C12 12/ O2
    OEM Model Description
    None Provided
    Documents

    No documents

    HITACHI

    M 712

    verified-listing-icon

    Verified

    CATEGORY

    Plasma Etch
    Last Verified: Over 60 days ago
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    65310

    Wafer Sizes:

    12"/300mm

    Vintage:

    2006

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    HITACHI M 712
    HITACHIM 712Plasma Etch
    Vintage: 0Condition: Used
    Last VerifiedOver 60 days ago
    HITACHI M 712
    HITACHIM 712Plasma Etch
    Vintage: 0Condition: Used
    Last VerifiedOver 60 days ago
    HITACHI M 712
    HITACHIM 712Plasma Etch
    Vintage: 2006Condition: Used
    Last VerifiedOver 60 days ago

    HITACHI

    M 712

    verified-listing-icon

    Verified

    CATEGORY

    Plasma Etch
    Last Verified: Over 60 days ago
    listing-photo-4d4d568d110f486eb390b5f1a85478df-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1148/4d4d568d110f486eb390b5f1a85478df/eb970e21cae94b20902d2f66345da5fc_94032383ea9240129ee14e074224097345005c_mw.jpeg
    listing-photo-4d4d568d110f486eb390b5f1a85478df-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1148/4d4d568d110f486eb390b5f1a85478df/593c2bacb4eb4cf5a15eb359d11eddcb_424f17a07b184d8aa1d5d3c07e06c7f145005c_mw.jpeg
    listing-photo-4d4d568d110f486eb390b5f1a85478df-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1148/4d4d568d110f486eb390b5f1a85478df/e8ae52eb877d4288ab495c60811aa656_dcb2220f9dad449bbde69f61b4f90db645005c_mw.jpeg
    listing-photo-4d4d568d110f486eb390b5f1a85478df-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1148/4d4d568d110f486eb390b5f1a85478df/e154146f6c2c41c39da2dfd1ead0a2f5_bc40b1fc59a04aac9757d6ede03198c5_mw.jpeg
    listing-photo-4d4d568d110f486eb390b5f1a85478df-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1148/4d4d568d110f486eb390b5f1a85478df/f249fbba6b224c10b16b1ffd8f759893_5b30e0831f8d4080b24642f91fd8326945005c_mw.jpeg
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    65310

    Wafer Sizes:

    12"/300mm

    Vintage:

    2006

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    Type: 300mm M712 mainframe M711 setup one Etch chamber Software revision: 1.07 PMv.02.16M Etcher, 12" (3) Cassettes Positions SECS II Interface: HSMS Neslab coolflow III Chiller Power supply: 208 VAC, 3-Phase, 50/60 Hz Mainframe: Robot P/N: CR-712V HITACHI 3 position Loader Chamber: ESC Type: Bipolar Endpoint type: Hitachi EPD monitor ePMv02.16M SHIMAZU EC TMP 3203LMC-K1 EC TMP Controller DAIHEN ES7-IIA EC Source generator PEARL CF-500-400K EC Bias generator Gas configuration: Line / EC1 / Strip 1 / Ar 2 / C12 3 / SF6 4 / HBr 5 / CF3 6 / CH4 7 / NF3 8 / O2 9 / N2 10/ SF6 11/ C12 12/ O2
    OEM Model Description
    None Provided
    Documents

    No documents

    Similar Listings
    View All
    HITACHI M 712
    HITACHI
    M 712
    Plasma EtchVintage: 0Condition: UsedLast Verified: Over 60 days ago
    HITACHI M 712
    HITACHI
    M 712
    Plasma EtchVintage: 0Condition: UsedLast Verified: Over 60 days ago
    HITACHI M 712
    HITACHI
    M 712
    Plasma EtchVintage: 2006Condition: UsedLast Verified: Over 60 days ago