Overview

FPD Steppers Resolution (L/S): 1.5 μm Exposure field: 132 mm square Exposure wavelength: i-line (365 nm wavelength) Projection magnification: 1:1.25 Overlay: ≦ ±0.30 μm (3σ) Maximum plate size: 730 × 920 mm Reticle size: 6-in. (0.25-in. thickness) Takt time: (30 shots) 65 seconds (50 mJ/cm2)