
Description
Furnace RTP SHS2800Configuration
Power Requirements: Other V 50 Hz 3 PhaseOEM Model Description
STEAG / MATTSON / AST SHS 2800 is a RTP / RTA / EPI system. The SHS 2800 can produce wafer size of 6” and 8”Documents
No documents
Verified
CATEGORY
Photolithography
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
152905
Wafer Sizes:
6"/150mm, 8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
MATTSON / STEAG / AST
SHS 2800
CATEGORY
Photolithography
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
152905
Wafer Sizes:
6"/150mm, 8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Furnace RTP SHS2800Configuration
Power Requirements: Other V 50 Hz 3 PhaseOEM Model Description
STEAG / MATTSON / AST SHS 2800 is a RTP / RTA / EPI system. The SHS 2800 can produce wafer size of 6” and 8”Documents
No documents