Axcelis acquired Fusion Systems Corporation in August 1997.
Fusion is a leading worldwide supplier of single-wafer ashers and photostabilizers used in the fabrication of advanced semi- conductor devices.

AXCELIS / FUSION

200 ACU 

200 MCU

The FUSION M150PC, manufactured by AXCELIS, is a photostabilizer system used in the semiconductor industry. It is designed to work with 6-inch wafer sizes. The system belongs to the Microlite 150 series and is known for its ability to provide a clean and efficient one-step process for hardening photoresists. It offers high production throughputs, making it suitable for semiconductor manufacturing applications where photoresist hardening is required

M150PC

RAPIDCURE 320FC

The Fusion 200PCU PoLo is a product from Axcelis Technologies that offers a cost-effective single chamber solution for processing 125-200mm wafers. It features a rapid, one-step UV Bake™ Process that replaces the standard resist hardbake, allowing for higher process margins and increased consistency within dry etch and ion implantation sequences. This makes it a valuable tool for improving the efficiency and effectiveness of semiconductor manufacturing processes.

200 PCU

The Fusion m200pcu is a Photostabilizer System made by Fusion Systems. It utilizes the standard dual unicassette wafer handling platform. The Fusion m200pcu is a single chamber DUV Photostabilizer with a wafer size of 8" or 6". It has shielded SECS cables and is used for UV Bake process applications. The irradiator contains an Hg High Intensity Lamp and 2.45 GHz magnetrons.

M200PCU

MICROLITE

The Fusion M150 is a photoresist stabilization tool used for deep UV flood exposure and features a 150mm heated/water cooled wafer chuck.

M150

M200 ACU

M150PCU

The Fusion M200PC is a photostabilizer used in the semiconductor industry. It uses a special process to harden and impact high-temperature stability to photoresist materials on semiconductor wafers. Photostabilized wafers are capable of withstanding high temperature hard baking.

AXCELIS / FUSION

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Top AXCELIS / FUSION Photolithography

200 ACU

200 MCU

M150PC

RAPIDCURE 320FC

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