TWINSCAN XT:1950Hi
Category
193 nm Step and ScanOverview
The XT:19x0 series includes the XT:1900Gi and XT:1950Hi systems, both featuring the industry’s largest numerical aperture of 1.35. In total, ASML has shipped more than 160 TWINSCAN immersion systems, all capable of imaging sub-60 nm chip features.
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