
Description
No missing parts PLC broken down PLC / SW problems Vacuum pump, turbo pump, no chillersConfiguration
Gasses/Process: SiH4/Ar2%, CH4, NH3, N2, O2, Ar, CF4, N2OOEM Model Description
Plasma Enhanced Chemical Vapor Deposition SystemDocuments
No documents
Verified
CATEGORY
PECVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Idle
Product ID:
128488
Wafer Sizes:
8"/200mm
Vintage:
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PLASMATHERM
Vision 310
CATEGORY
PECVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Idle
Product ID:
128488
Wafer Sizes:
8"/200mm
Vintage:
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No missing parts PLC broken down PLC / SW problems Vacuum pump, turbo pump, no chillersConfiguration
Gasses/Process: SiH4/Ar2%, CH4, NH3, N2, O2, Ar, CF4, N2OOEM Model Description
Plasma Enhanced Chemical Vapor Deposition SystemDocuments
No documents