Description
No descriptionConfiguration
4 chamber PECVDOEM Model Description
VERSALINE PECVD systems can deposit many different high-quality films, ensuring you get maximum, reliable high productivity at a low total cost of ownership. Process Silane-based films (a-Si, SiO2, SiNx, SiON, SiC, SiOF, a-SiC) TEOS films Stress control High and low deposition rates Tunable refractive indexDocuments
No documents
Verified
CATEGORY
PECVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
110100
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PLASMATHERM
VERSALINE PECVD
CATEGORY
PECVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
110100
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
4 chamber PECVDOEM Model Description
VERSALINE PECVD systems can deposit many different high-quality films, ensuring you get maximum, reliable high productivity at a low total cost of ownership. Process Silane-based films (a-Si, SiO2, SiNx, SiON, SiC, SiOF, a-SiC) TEOS films Stress control High and low deposition rates Tunable refractive indexDocuments
No documents