Description
No descriptionConfiguration
Process: RIE nitride and oxide. LoadLock: holds 2 cassettes and has a transfer chamber between the 2 process chambers Materials Exposure: Gas and Silicon wafers. Cortex Computer upgrade and software Dual chamber etcher. Has the vortex computer upgrade. System currently installed in Fab and running. 3 Edwards iQDP80 pumps and 2 Neslab chillers.OEM Model Description
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PLASMATHERM / UNAXIS
VERSALOCK 700
Verified
CATEGORY
PECVD
Last Verified: 28 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
105078
Wafer Sizes:
4"/100mm, 6"/150mm
Vintage:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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PLASMATHERM / UNAXIS
VERSALOCK 700
CATEGORY
PECVD
Last Verified: 28 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
105078
Wafer Sizes:
4"/100mm, 6"/150mm
Vintage:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Process: RIE nitride and oxide. LoadLock: holds 2 cassettes and has a transfer chamber between the 2 process chambers Materials Exposure: Gas and Silicon wafers. Cortex Computer upgrade and software Dual chamber etcher. Has the vortex computer upgrade. System currently installed in Fab and running. 3 Edwards iQDP80 pumps and 2 Neslab chillers.OEM Model Description
None ProvidedDocuments
No documents