Description
CVD, CUConfiguration
2x FOUP Loadports Mini-Environment (Front End) Atmospheric Robot User Interface: screen & computer Light Tower 2x Loadlocks 2x Loadlock Cooling Pedestals 2x Linear Transfer Modules 4x Showerheads (subject to availability) Al Heater Pedestals with lift pins (station 1) Al Heater Pedestals (stations 2-4) Pneumatic Spindle Integrated Liquid Delivery System (not on this particular configuration) Low Frequency RF Generator High Frequency RF Generator RF Match Endpoint Controller Gas Box Local Power Box 3x Super Input / Output Controller (SIOC or HDSIOC – depends on age of tool) Motion Controller Module Controller Ceramic Carrier Rings (subject to availability) Non-F47 or F47 Configuration (depends on age of tool) Additional details available upon requestOEM Model Description
VECTOR is a PECVD system for dielectric films that radically transforms the playing field in terms of capital productivity. A 200mm/300mm bridge tool, VECTOR is designed to deliver a fully integrated low-k dielectric structure at 0.10 micron and smaller design rules. VECTOR is designed for high reliability, with 40% fewer critical subassemblies than the nearest competitor. With approximately 2/3rds the footprint of the nearest competitor, and a throughput of 120 wafers per hour.Documents
LAM RESEARCH / NOVELLUS
VECTOR
Verified
CATEGORY
PECVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
101692
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All
LAM RESEARCH / NOVELLUS
VECTOR
CATEGORY
PECVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
101692
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available