Description
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Technical Specifications •Handles up to 200mm wafer diameter •lower temperatures (180° to 400°C) • Thicker films (≥20µm) Key Applications •low k • thermal films, high-temperature PECVD •SiO2,SiON,SiNx,A-Si •APF(Advance patterning film) •NFARL (nitrogen free anti-reflective layer) ASSETS OF PRODUCER III 1 AMAt TC Producer Model: Producer III 2 AMAt TC Producer Model: SE Carbon (GST) NIL 3 Heat Exchanger Model: SteelHead-0 4 DPA RF Generator Model: DPG-10 5 Amat Producer Gas Panel NIL 6 Dry Gas Abatement System Model: CS195SC 7 Dry Vacuum Pump Model:ADS602P 8 Dry Vacuum Pump Model:ADS602P 9 Dry Vacuum Pump Model:ADS602P 10 3 Phase Transformer of 160 kVAOEM Model Description
Our Producer platform is the fastest and most cost-effective in the industry, capable of processing more than three wafers every minute in a highly compact footprint. It features a robot that can simultaneously transfer four wafers between its three paired processing stations and unique double-decker vacuum loadlocks.Documents
CATEGORY
PECVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
131951
Wafer Sizes:
8"/200mm
Vintage:
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
PRODUCER III
CATEGORY
PECVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
131951
Wafer Sizes:
8"/200mm
Vintage:
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available