Description
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ASM LPCVD System 4”, 6” Config: Silicon Nitride / Polysilicon, up to 150 mm - two tube systems capable of depositing polysilicon, silicon nitride and LTO - uses dedicated quartz boats - Tube 1: LPCVD of low temperature oxide - Tube 2: LPCVD of Silicon Nitride / PolysiliconOEM Model Description
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ASM
**PARTS**
Verified
CATEGORY
Parts
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
69651
Wafer Sizes:
4"/100mm, 6"/150mm
Vintage:
Unknown
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**PARTS**
CATEGORY
Parts
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
69651
Wafer Sizes:
4"/100mm, 6"/150mm
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
ASM LPCVD System 4”, 6” Config: Silicon Nitride / Polysilicon, up to 150 mm - two tube systems capable of depositing polysilicon, silicon nitride and LTO - uses dedicated quartz boats - Tube 1: LPCVD of low temperature oxide - Tube 2: LPCVD of Silicon Nitride / PolysiliconOEM Model Description
None ProvidedDocuments
No documents