Description
Dual open, One system has stainless skins , one has reflective host chuck option . 14.7 Sw. On both. Both have SSD raid drive upgrades .Configuration
No ConfigurationOEM Model Description
The KLA 5200 is an overlay metrology system that helps chipmakers improve process control and reduce time to market for advanced products with feature sizes down to .18 µm. It uses Coherence Probe Microscopy (CPM) to identify surfaces and can measure all layers, including low-contrast or grainy targets. The KLA 5200 can lower stepper cost-of-ownership by providing high-quality data to prevent lithography process errors, helping manage the overlay budget and maximizing lithography output.Documents
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KLA
5200
CATEGORY
Overlay
Last Verified: 5 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
137275
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Dual open, One system has stainless skins , one has reflective host chuck option . 14.7 Sw. On both. Both have SSD raid drive upgrades .Configuration
No ConfigurationOEM Model Description
The KLA 5200 is an overlay metrology system that helps chipmakers improve process control and reduce time to market for advanced products with feature sizes down to .18 µm. It uses Coherence Probe Microscopy (CPM) to identify surfaces and can measure all layers, including low-contrast or grainy targets. The KLA 5200 can lower stepper cost-of-ownership by providing high-quality data to prevent lithography process errors, helping manage the overlay budget and maximizing lithography output.Documents
No documents