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SINGULUS / STANGL ROTARIS
    Description
    A PVD Cluster tool with two process chambers: 1. RMS Chamber with 5 targets (RF/DC capable) 2. iPVD chamber with 1 (Al) target (magnetron sputtering) Condition: In Working Condition Repairs required: Turbo Pump Mag-drive Maintenance required: Rough Pump
    Configuration
    Configured to handle standard 8-inch notched wafers (can handle smaller wafers mounted on 8-inch carrier)
    OEM Model Description
    - Material evaluation due to co-sputter - Low initial costs on targets - COO - Flexible process configuration - Small footprint
    Documents
    File icon

    ROTARIS .pdf

    SINGULUS / STANGL

    ROTARIS

    verified-listing-icon

    Verified

    CATEGORY
    MOCVD

    Last Verified: Over 60 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    82129

    Wafer Sizes:

    8"/200mm

    Vintage:

    Unknown

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    Logistics Support
    Available
    Money Back Guarantee
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    Transaction Insured by Moov
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    SINGULUS / STANGL ROTARIS

    SINGULUS / STANGL

    ROTARIS

    MOCVD
    Vintage: 0Condition: Used
    Last VerifiedOver 60 days ago

    SINGULUS / STANGL

    ROTARIS

    verified-listing-icon
    Verified
    CATEGORY
    MOCVD
    Last Verified: Over 60 days ago
    listing-photo-4abb4280391143ef8e9cf8a6e9837af1-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/74511/4abb4280391143ef8e9cf8a6e9837af1/1a6647248dac402ba2f07e1868409384_rotaris_mw.jpg
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    82129

    Wafer Sizes:

    8"/200mm

    Vintage:

    Unknown

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    A PVD Cluster tool with two process chambers: 1. RMS Chamber with 5 targets (RF/DC capable) 2. iPVD chamber with 1 (Al) target (magnetron sputtering) Condition: In Working Condition Repairs required: Turbo Pump Mag-drive Maintenance required: Rough Pump
    Configuration
    Configured to handle standard 8-inch notched wafers (can handle smaller wafers mounted on 8-inch carrier)
    OEM Model Description
    - Material evaluation due to co-sputter - Low initial costs on targets - COO - Flexible process configuration - Small footprint
    Documents
    File icon

    ROTARIS .pdf

    Similar Listings
    View All
    SINGULUS / STANGL ROTARIS

    SINGULUS / STANGL

    ROTARIS

    MOCVDVintage: 0Condition: UsedLast Verified: Over 60 days ago