Description
MOCVDConfiguration
- Five 8" wafers - Penta Injector - EpiTT Version 1 - Single filter exhaust CT500 - TMGax2, TMAlx2, Cp2Mg - H2, N2, Nh3,Cl2 (no mixer) that was external of the system - Aixact version 7.1.2.8 - Ebara ESA80 process pump - Two scroll pumps: for the glove box (1) and the Antechamber (1) - Horiba MFC's - Process module 208VAC, RF Generator 480VAC - USA Voltage - No transfer modulesOEM Model Description
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AIXTRON
AIX G5+
Verified
CATEGORY
MOCVD
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
96865
Wafer Sizes:
Unknown
Vintage:
2013
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Logistics Support
Available
Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
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View AllAIXTRON
AIX G5+
Verified
CATEGORY
MOCVD
Last Verified: 11 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
96865
Wafer Sizes:
Unknown
Vintage:
2013
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
MOCVDConfiguration
- Five 8" wafers - Penta Injector - EpiTT Version 1 - Single filter exhaust CT500 - TMGax2, TMAlx2, Cp2Mg - H2, N2, Nh3,Cl2 (no mixer) that was external of the system - Aixact version 7.1.2.8 - Ebara ESA80 process pump - Two scroll pumps: for the glove box (1) and the Antechamber (1) - Horiba MFC's - Process module 208VAC, RF Generator 480VAC - USA Voltage - No transfer modulesOEM Model Description
None ProvidedDocuments
No documents