Onto Innovation is a worldwide leader in the design, development, manufacture and support of process control tools that perform macro defect inspections and metrology, lithography systems, and process control analytical software used by semiconductor wafer and advanced packaging device manufacturers. 

ONTO / RUDOLPH / AUGUST

S300

2 Loadport with FOUP Capability (Brooks) 

Loadports Carrier Reader: RFID Type 

Robot: Brooks

Light Source: 
laser 633 nm HeNe and solid-state 780 nm , and 905 nm
UV lamp: 190nm to 400nm

Function: 
Spectroscopic reflectoment covering 190 nm to 905 nm
Spot size : 50 μm DUV and 2.5 μm/15 μm /50 μm (high, medium and low magnification) visible /IR

Enhanced modulated scanning monochrometer for DUV range
OMA detector for the visible/IR range

Details Attached 

S300

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ONTO / RUDOLPH / AUGUST

S300

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ONTO / RUDOLPH / AUGUST

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ONTO / RUDOLPH / AUGUST

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ONTO / RUDOLPH / AUGUST

S300