The Vistec LMS IPRO is a high-end device designed to support mask metrology for advanced technology nodes. It is a reticle pattern placement metrology system used to support the development of advanced reticle technology that will be used to pattern the most critical layers of the industry’s next-generation integrated circuits.

KLA-Tencor Corporation announced that it has completed its acquisition of the Microelectronic Inspection Equipment (MIE) business unit of Vistec Semiconductor Systems. 
Vistec Semiconductor Systems - MIE provides advanced semiconductor mask and wafer manufacturing systems. 

On February of 2006, Leica Microsystems' Semiconductor Equipment Division has a new name: Vistec Semiconductor Systems. The name change is a result Golden Gate Capital takeover of Leica's semiconductor business.

LMS IPRO

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