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KLA ALPHA-STEP D-120
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:61492

    Wafer Sizes:Unknown

    Vintage:2010

    Description

    Used tool Can DEMO

    Configuration

    No Configuration

    Documents
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    OEM Model Description

    The AlphaStep® D-120 Stylus Profiler is a surface profilometry system designed for engineering and research. It has a 55mm scan length, a Z sensor range up to 1.2mm, and a 200mm motorized sample positioning stage. It offers sub-angstrom resolution, 6 angstrom step height repeatability, and motorized X-Y stages. The system is compatible with Windows XP, Vista, and Windows 7. Its graphical user interface allows for continuous acquisition and display of scan data. Applications include surface texture, precision step height, surface form, thin film stress, biological, MEMS, 3D imaging, and material characterization.

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