The Opti-Probe 5240 is a tool designed to meet thin film metrology requirements. It offers full spectrum Spectroscopic Ellipsometry to directly measure optical constants, Absolute Ellipsometry to accurately characterize your thinnest films.

KLA-Tencor Corporation announced it has completed its acquisition of Therma-Wave Corporation.
Therma-Wave develops, manufactures, and sells process control metrology systems used in the manufacture of semiconductors.

KLA / THERMA-WAVE

OP-5240

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OP-5240

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