OP-2600 DUV has integrated deep ultra-violet reflectance, or DUV, with the existing system to expand measurement range.

KLA-Tencor Corporation announced it has completed its acquisition of Therma-Wave Corporation.
Therma-Wave develops, manufactures, and sells process control metrology systems used in the manufacture of semiconductors.

KLA / THERMA-WAVE

OP-2600 DUV

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OP-2600 DUV

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