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NANOSPEC 5100

Category
Metrology
Overview

In 1994, the Company's Japanese subsidiary introduced two table-top systems, the Models 5000 and 5100 specifically engineered to meet the needs of the Japanese market. These systems are modified versions of the Models 4000 and 4150, respectively. 75 mm to 200 mm substrates Wide measurement range Computerized maps Programmable, motorized stage Auto-focus Programmable software.

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