Overview

Ø 2” up to Ø 8” | 2” x 2” up to 6” x 6” Typical chemicals: NMP, DMSO The Maximus 804 Lift-Off is a dedicated system for high throughput single wafer processes. It is equipped with an immersion soaking bath, a high pressure spray Lift-Off cleaning unit and a final cleaning unit. The highest level of cleanliness is guaranteed through the automatic end-effector change.