
Description
VARIAN EHP500 MEDIUM CURRENT SYSTEM WITH OPTIONS (PEA605)Configuration
Software Version - V13.43.29 CIM - GEM and SECS Process - Medium Current Implanter Handler System - Endstation PP+ with both Loadlock Excluded Lock Lock Rough LHS & RHS LPT Analyzer Turbo Pump & Controller Endstation 2 stage pump Target cryo CT10 IHS and RHS LL turbo pump Source Rough pump Source Turbo pump and controller Beamline turbo pump and controllerOEM Model Description
The E500-EHP is a medium current ion implanter made by AMAT (Varian). It processes one or two cassettes of wafers as a batch, a single wafer at a time.Documents
CATEGORY
Medium Current
Last Verified: 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
150920
Wafer Sizes:
8"/200mm
Vintage:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View AllAPPLIED MATERIALS (AMAT) / VARIAN
E500-EHP
CATEGORY
Medium Current
Last Verified: 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
150920
Wafer Sizes:
8"/200mm
Vintage:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available