Description

Thin Wafer handling Hydrogen Implanter Exterior Dimensions Width 127.559 in (324.0 cm) Depth 197.244 in (501.0 cm) Height 96.063 in (244.0 cm)

Configuration

No Configuration

OEM Model Description

The VARIAN E500 is a medium current ion implanter system designed for use with 150mm wafer sizes. This system is capable of delivering precise and accurate implantation of ions into semiconductor wafers, making it an essential tool in the manufacturing of semiconductor devices.