
Description
Need to repair: Gauge controller/Dry pump/In-air Transfer robot /Y-scan controller/E-chuck Shut down in 2023 The tool will not include: turbo pump cryo pump dry pump compressorConfiguration
Med-C ImpOEM Model Description
NV-MC3 300mm high tilt and medium current applications for all chips.Documents
No documents
AXCELIS
NV MC3
CATEGORY
Medium Current
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Down
Product ID:
142915
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Need to repair: Gauge controller/Dry pump/In-air Transfer robot /Y-scan controller/E-chuck Shut down in 2023 The tool will not include: turbo pump cryo pump dry pump compressorConfiguration
Med-C ImpOEM Model Description
NV-MC3 300mm high tilt and medium current applications for all chips.Documents
No documents