Description

- Macobot for In-Air handling - Gas Box with SDS Bottles - Cryopumps installed - P3/P4/P5 On-Board 8 Edwards - Turbo Pumps installed - P1 STP 1003 C - P2A STP 301C - P2B STP 1003 C - Rough pumps installed - RP1 Edwards IGX 100 MTI - RP2 Edwards QDP40 - RP3 Edwards iGX600M

Configuration

No Configuration

OEM Model Description

Axcelis Technologies' 8250 medium current line uses an ultra-pure, parallel beam design enhanced by extremely precise wafer positioning, enabling the minute detailing of transistors. The 8250 provides the advanced process capabilities necessary for medium current implants. Incorporating several key productivity enhancements in its design, it offers enhanced yield and serial processing advantages. This system is a fully automated, 200mm, serial processing system designed to maximize productivity and minimize all forms of contamination. Production-proven beam optics and wafer position control deliver pure, parallel and repeatable beams. The 8250 is the industry's only medium current system to incorporate a final energy filter, ensuring maximum beam purity over the entire energy range of multiply-charged species up to 750keV. New features such as the extended life source (ELS), electrostatic chuck, fully integrated statistical process control (SPC), and slit load lock process chamber allow the 8250 to provide superior processing capability at the lowest cost of ownership.