Description

TSA (Top Side Alignment) The machine is a fully automatic cassette-to-cassette machine with pre-alignment. for Proximity-Contact, Soft-Contact, Hard-Contact, and prepared for Vacuum-Contact

Configuration

SUSS MASK ALIGNER MA150e Windows 10 based with Suss AL /Autoalign System Alignment System MA150e TSA PC -Aut. Adjustment (Autoalignment System) Cognex 8100 ( Patmex ) TSA Lamphouse unit LH 1000 with HP and 1000W Hg-Lamp, Intensity >25 mW/cm², Wavelength: 365 nm (I-line filter) Suss DVM 6 dual video Microscope (2CCD–Cameras /set of rotating Objectives L+R) Objective 5x Objective 10x Objective 20X Transport Plates Kit MA150 / W100-150/Even Exposure Chuck Prox/Cont W150 Mask holder MA 150/TL/Prox/Cont/W150 6” Chuck and 7” x 7” Mask holder CIC1200 Lamp Power supply Set of Exposure optics Typ A / UV400 350-450 nm ( g-, h-, i-line ) Non Contact Prealigner Station with IR – Sensor Operators Manual MA 150e English (Digi.)

OEM Model Description

KARL SUSS MA 150E is a Mask Aligners system and it can be used with 2”-4” wafer size.

Documents

No documents

SUSS MicroTec / KARL SUSS

MA150E

Verified

Mask/Bond Aligners

Last Verified: Over 60 days ago

Key Item Details

Condition:

Refurbished

Operational Status:

Unknown

Product ID:

132885

Wafer Sizes:

6"/150mm

Vintage:

2010

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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