Description
- UV400 split field Optics (for 365nm and 405nm exposure) - CIC 500 Power Supply - Capable of Hard, Soft, Vacuum Contact with proper tooling. - 1500W Lamphouse - Vibration Isolation Table (for Suss MA6) - 150mm Chuck included - 7x7 Maskholder included - System Power: 230V, 50/60 Hz - Operations Manual for Suss MA6 Mask AlignerConfiguration
- Topside (TSA) Alignment - Backside (BSA) Alignment - Suss DVM6 Microscope Objectives: - UV400 split field Optics (for 365nm and 405nm exposure) - CIC 500 Power Supply - Capable of Hard, Soft, Vacuum Contact with proper tooling. - 1500W Lamphouse - Vibration Isolation Table (for Suss MA6) - 150mm Chuck included - 7x7 Mask holder included - System Power: 230V, 50/60 Hz - Operations Manual for Suss MA6 Mask AlignerOEM Model Description
The KARL SUSS MA6/BA6 is a Mask Aligners system. The MA6/BA6 can be used with 6"/150mm wafer sizes.Documents
No documents
SUSS MicroTec / KARL SUSS
MA6/BA6
Verified
CATEGORY
Mask/Bond Aligners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
53530
Wafer Sizes:
6"/150mm
Vintage:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SUSS MicroTec / KARL SUSS
MA6/BA6
CATEGORY
Mask/Bond Aligners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
53530
Wafer Sizes:
6"/150mm
Vintage:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
- UV400 split field Optics (for 365nm and 405nm exposure) - CIC 500 Power Supply - Capable of Hard, Soft, Vacuum Contact with proper tooling. - 1500W Lamphouse - Vibration Isolation Table (for Suss MA6) - 150mm Chuck included - 7x7 Maskholder included - System Power: 230V, 50/60 Hz - Operations Manual for Suss MA6 Mask AlignerConfiguration
- Topside (TSA) Alignment - Backside (BSA) Alignment - Suss DVM6 Microscope Objectives: - UV400 split field Optics (for 365nm and 405nm exposure) - CIC 500 Power Supply - Capable of Hard, Soft, Vacuum Contact with proper tooling. - 1500W Lamphouse - Vibration Isolation Table (for Suss MA6) - 150mm Chuck included - 7x7 Mask holder included - System Power: 230V, 50/60 Hz - Operations Manual for Suss MA6 Mask AlignerOEM Model Description
The KARL SUSS MA6/BA6 is a Mask Aligners system. The MA6/BA6 can be used with 6"/150mm wafer sizes.Documents
No documents