
Description
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Mask : 7inch mask Slit : 3.0mm Currently intensity : around 400mW/cm2 (1.8kW) Configuration: - Main body - Control box - Lamp power supply - CTC/TDC unit - Exhaust fanOEM Model Description
The Canon MPA-600FA is a high-throughput mirror projection mask aligner delivers stable performance ideal for VLSI chip production, boasting a 1.5um resolution and +/- 6um depth-of-focus across the entire field for 4”, 5”, and 6” wafers. With field-proven auto alignment via laser scanning, target placement in scribe lines, and seamless compatibility for mix-and-match with steppers, it's a top-tier solution for precision alignments.Documents
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MPA-600FA
CATEGORY
Mask/Bond Aligners
Last Verified: 19 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
151579
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available