Description
Medium Current ImplantConfiguration
-Software Version: 1.7.0.4DP14 -CIM: GEM -Process: ImplantOEM Model Description
The Optima MD is the only low energy, mid-dose ion implanter for all channel engineering applications in the low-dose and mid-dose regimes. The single wafer productivity-driven platform covers traditional medium current processes as well as emerging low energy mid-dose HALO implants.Documents
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AXCELIS
OPTIMA MD
CATEGORY
Low Current
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
112961
Wafer Sizes:
12"/300mm
Vintage:
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Medium Current ImplantConfiguration
-Software Version: 1.7.0.4DP14 -CIM: GEM -Process: ImplantOEM Model Description
The Optima MD is the only low energy, mid-dose ion implanter for all channel engineering applications in the low-dose and mid-dose regimes. The single wafer productivity-driven platform covers traditional medium current processes as well as emerging low energy mid-dose HALO implants.Documents
No documents