Description
lon implanterConfiguration
No ConfigurationOEM Model Description
The Optima MD is the only low energy, mid-dose ion implanter for all channel engineering applications in the low-dose and mid-dose regimes. The single wafer productivity-driven platform covers traditional medium current processes as well as emerging low energy mid-dose HALO implants.Documents
No documents
Similar Listings
View All
AXCELIS
OPTIMA MD
CATEGORY
Low Current
Last Verified: Over 60 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Deinstalled
Product ID:
113347
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
lon implanterConfiguration
No ConfigurationOEM Model Description
The Optima MD is the only low energy, mid-dose ion implanter for all channel engineering applications in the low-dose and mid-dose regimes. The single wafer productivity-driven platform covers traditional medium current processes as well as emerging low energy mid-dose HALO implants.Documents
No documents