Description
Version 1Configuration
No ConfigurationOEM Model Description
The RAITH150 is a multipurpose tool that can perform direct e-beam exposure and wafer scale process development at suboptical resolution. It includes integrated linewidth and metrology functions that optimize process reproducibility. The SEM side can be used to obtain large high magnification tiled images by taking advantage of the high resolution interferometer stage.Documents
No documents
Verified
CATEGORY
Lithography
Last Verified: 8 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
153724
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
RAITH
150 E BEAM
CATEGORY
Lithography
Last Verified: 8 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
153724
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Version 1Configuration
No ConfigurationOEM Model Description
The RAITH150 is a multipurpose tool that can perform direct e-beam exposure and wafer scale process development at suboptical resolution. It includes integrated linewidth and metrology functions that optimize process reproducibility. The SEM side can be used to obtain large high magnification tiled images by taking advantage of the high resolution interferometer stage.Documents
No documents