Description
-E-beam lithography system w/ SEM -Column was replaced 5 years ago -Has a Scanning Electron Microscope to facilitate imaging and navigation of the sample -Had a service contract until 2 years ago, has been idle for a couple years -Hardware and key components are in good shape -The computer was upgradedConfiguration
SEM inspection and sample navigation * Image resolution: 2.0 nm @ 20 kV 4.0 nm @ 1 kVOEM Model Description
The RAITH150 is a multipurpose tool that can perform direct e-beam exposure and wafer scale process development at suboptical resolution. It includes integrated linewidth and metrology functions that optimize process reproducibility. The SEM side can be used to obtain large high magnification tiled images by taking advantage of the high resolution interferometer stage.Documents
No documents
Verified
CATEGORY
Lithography
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
131301
Wafer Sizes:
Unknown
Vintage:
2002
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
RAITH
150 E BEAM
CATEGORY
Lithography
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
131301
Wafer Sizes:
Unknown
Vintage:
2002
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
-E-beam lithography system w/ SEM -Column was replaced 5 years ago -Has a Scanning Electron Microscope to facilitate imaging and navigation of the sample -Had a service contract until 2 years ago, has been idle for a couple years -Hardware and key components are in good shape -The computer was upgradedConfiguration
SEM inspection and sample navigation * Image resolution: 2.0 nm @ 20 kV 4.0 nm @ 1 kVOEM Model Description
The RAITH150 is a multipurpose tool that can perform direct e-beam exposure and wafer scale process development at suboptical resolution. It includes integrated linewidth and metrology functions that optimize process reproducibility. The SEM side can be used to obtain large high magnification tiled images by taking advantage of the high resolution interferometer stage.Documents
No documents