
Description
Details AttachedConfiguration
• Diode-pumped solid state laser with 355 nm wavelength - Exposure of standard i-line resists • Automatic handling of 150 mm wafers and 6“ masks • Exposure of substrates with almost arbitrary form factor with manual handling (max. thickness 9 mm) • Maximum exposure area 400 mm x 400 mm • Front to backside alignment possible • 3 exchangeable write heads with different resolution and throughput • Exposure of high topography substrates with special write head with increased working distance • Greyscale lithographyOEM Model Description
None ProvidedDocuments
Verified
CATEGORY
Lithography
Last Verified: 20 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
142995
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
HEIDELBERG INSTRUMENTS
VPG 400
CATEGORY
Lithography
Last Verified: 20 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
142995
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available