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OPTORUN OTFC-1550

Description

No description

Configuration

Vacuum Chamber: SUS304 φ1550mm×1800mm (H) Substrate Dome Size: φ1400mm Substrate Dome Rotation Speed: 10 rpm to 30 rpm (Variable) Optical Film Thickness Control System: HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance Crystal Film Thickness Monitor: XTC/3 plus 6-point rotary sensor Evaporation Source: EB source: 2 units Ion Source: 23 cm RF ion source Vacuum System: Roughing Pump 2 Diffusion Pumps + Poly cold Power Requirements: 3-phase 200V 50/60Hz 120kVA approx. Cooling Water Flow Rate: 180ℓ/min or greater Compressed Air Pressure: 0.5MPa or greater Gross Weight: 11000kg approx.

OEM Model Description

None Provided

Documents

OPTORUN OTFC-1550.pdf

OPTORUN

OTFC-1550

verified-listing-icon

Verified

CATEGORY

Ion Beam / IBD

Last Verified: 10 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

59518

Wafer Sizes:

Unknown

Vintage:

2015

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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verified-listing-icon

Verified

CATEGORY

Ion Beam / IBD

Last Verified: 10 days ago

listing-photo-b74b6bbf5d0d4a5a8106300997c254c1-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/52662/b74b6bbf5d0d4a5a8106300997c254c1/0cde3b827915469a871a889ba74c61af_b131543df7f19ce078a0b2448667dc40_mw.jpg

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listing-photo-b74b6bbf5d0d4a5a8106300997c254c1-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/52662/b74b6bbf5d0d4a5a8106300997c254c1/dbeb7ff4a44d4beb8e1cdd0d6cba0753_28d1564aab24d5a9912a4c8e182cf888_mw.jpg

listing-photo-b74b6bbf5d0d4a5a8106300997c254c1-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/49182/b74b6bbf5d0d4a5a8106300997c254c1/bd760790c1404688954440e1b6baafc6_0d3e50215258406ea5b50ebb23a3de6045005c_mw.jpeg

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

59518

Wafer Sizes:

Unknown

Vintage:

2015

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

No description

Configuration

Vacuum Chamber: SUS304 φ1550mm×1800mm (H) Substrate Dome Size: φ1400mm Substrate Dome Rotation Speed: 10 rpm to 30 rpm (Variable) Optical Film Thickness Control System: HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance Crystal Film Thickness Monitor: XTC/3 plus 6-point rotary sensor Evaporation Source: EB source: 2 units Ion Source: 23 cm RF ion source Vacuum System: Roughing Pump 2 Diffusion Pumps + Poly cold Power Requirements: 3-phase 200V 50/60Hz 120kVA approx. Cooling Water Flow Rate: 180ℓ/min or greater Compressed Air Pressure: 0.5MPa or greater Gross Weight: 11000kg approx.

OEM Model Description

None Provided

Documents

OPTORUN OTFC-1550.pdf

Similar Listings

OPTORUN OTFC-1550

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Ion Beam / IBDVintage: 2015Condition: UsedLast Verified:10 days ago

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Ion Beam / IBDVintage: 2015Condition: UsedLast Verified:Over 60 days ago

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Ion Beam / IBDVintage: 2015Condition: UsedLast Verified:Over 60 days ago