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OPTORUN OTFC-1550

Description

No description

Configuration

Vacuum Chamber: SUS304, φ1550mm×1800mm (H) Substrate Dome Size: φ1400mm Substrate Dome Rotation Speed: 10 rpm to 30 rpm (Variable) Optical Film Thickness Control System: HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance Crystal Film Thickness Monitor: XTC/3 plus 6-point rotary sensor Evaporation Source EB source: 2 units, (JEOL JST-10F) Ion Source: 17 cm RF ion source Vacuum System: Roughing Pump(Edwards EM275), 2 Diffusion Pumps + Polycold (MaxCool 4000H) Ultimate Pressure: 7.0×10-5 Pa or lower Pump Down Rate: 15 minutes (Atm. to 1.3×10-3 Pa) Substrate Heater: 350℃ (max.) Layout Dimensions: 5500mm (W)×7200mm (D)×3700mm (H) approx. Power Requirements: 3-phase, 200V, 50/60Hz, 120kVA approx. Cooling Water Flow Rate: 180ℓ/min or greater Compressed Air Pressure: 0.5MPa or greater Gross Weight: 10000kg approx.

OEM Model Description

None Provided

Documents

Specification of OTFC-1550.xlsx

OPTORUN

OTFC-1550

verified-listing-icon

Verified

CATEGORY

Ion Beam / IBD

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Deinstalled

Product ID:

128766

Wafer Sizes:

Unknown

Vintage:

2015

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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listing-photo-1b93c328977643ac9f9baf1dca63daea-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/52662/1b93c328977643ac9f9baf1dca63daea/02a4debc2b904f71b809b0fbadf927d8_otfc155048_mw.jpg

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Key Item Details

Condition:

Used

Operational Status:

Deinstalled

Product ID:

128766

Wafer Sizes:

Unknown

Vintage:

2015

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

No description

Configuration

Vacuum Chamber: SUS304, φ1550mm×1800mm (H) Substrate Dome Size: φ1400mm Substrate Dome Rotation Speed: 10 rpm to 30 rpm (Variable) Optical Film Thickness Control System: HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance Crystal Film Thickness Monitor: XTC/3 plus 6-point rotary sensor Evaporation Source EB source: 2 units, (JEOL JST-10F) Ion Source: 17 cm RF ion source Vacuum System: Roughing Pump(Edwards EM275), 2 Diffusion Pumps + Polycold (MaxCool 4000H) Ultimate Pressure: 7.0×10-5 Pa or lower Pump Down Rate: 15 minutes (Atm. to 1.3×10-3 Pa) Substrate Heater: 350℃ (max.) Layout Dimensions: 5500mm (W)×7200mm (D)×3700mm (H) approx. Power Requirements: 3-phase, 200V, 50/60Hz, 120kVA approx. Cooling Water Flow Rate: 180ℓ/min or greater Compressed Air Pressure: 0.5MPa or greater Gross Weight: 10000kg approx.

OEM Model Description

None Provided

Documents

Specification of OTFC-1550.xlsx

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